Browsing by Author "Barrot, François"
6 DOF repeatability measurement setup for measuring position of assembled silicon parts with nanometric resolution. Kruis, Johan; Gentsch, Pascal; Theiler, Pius; Barrot, François; Cosandier, Florent; Henein, Simon (2015-06-06)This article presents a test setup dedicated to the measurement of the 6 degrees of freedom relative positioning assembly repeatability of three micro-manufactured parts equivalent to those composing a mesoscale flexure-based ...
Cosandier, Florent; Barrot, François; Kruis, Johan; Voruz, Luc; Musy, Grégory; Droz, Serge; Giriens, Laurent; Glettig, Wayne; Dominé, Emmanuel (2016-01-06)In order to improve the assembly process of microcomponents, three high precision mechanisms were developed. All of them were designed and fabricated at CSEM, through a silicon etching process (DRIE). The devices are an ...
Lani, Sébastien; Pétremand, Yves; Dubochet, Olivier; Dadras, Mohammad Mehdi; Barrot, François; Dominé, Emmanuel; Despont, Michel (2019-09-25)