Browsing by Author "Erdmann, Arne"

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Plenoptic Inspection System for Automatic Quality Control of MEMS and Microsystems

Kirschmann, Moritz A.; Pierer, Jörg; Steinecker, Alexander; Schmid, Philipp; Erdmann, Arne (2021)

Optical quality control of MEMS and microsystems is challenging as these structures are micro-scale and three dimensional. Here we lay out different optical systems that can be used for 3D optical quality control in ...