Browsing by Author "Rattunde, O."

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Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Mertin, S.; Heinz, B.; Rattunde, O.; Christmann, G.; Dubois, M. A.; Nicolay, S.; et al. (2018)

Partial substitution of aluminium by scandium in the wurtzite structure of aluminium nitride (AIN) leads to a large increase of the piezc electric response by more than a factor of 2. Therefore, aluminium scandium nitride ...
Sputter deposition technology for Al(1?x)ScxN films with high Sc concentration

Heinz, B.; Mertin, S.; Rattunde, O.; Dubois, M. A.; Nicolay, S.; Christmann, G.; et al. (2017)

Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. ...