Now showing items 1-1 of 1

    • MEMS scanner with 2D tilt, piston and focus motion 

      Lani, S.; Bayat, D.; Petremand, Y.; Regamey, Y. J.; Onillon, E.; Pierer, J.; et al. (2017)
      A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of and/-15 degrees, a piston motion of 50 mu m and a focus/defocus control system of a 2mm diameter ...