Browsing by Research Areas "MEMS & Packaging"
Now showing items 1-20 of 21
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3d Printing on MEMS: Integration of 3d Shock Stopper on a Micro Mirror
(2019)We have developed a polymer-based 3D shock stopper and absorber based on micro stereolithography technology that is integrated onto a prefabricated wafer of a MEMS micro mirror used as a high-power laser steering system. ... -
Compact optical MEMS accelerometers and temperature sensors
(2017)Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, ... -
Introduction of an angle interrogated, MEMS-based, optical waveguide grating system for label-free biosensing
(2016)The presented label-free optical biosensor system relies on a MEMS micro-mirror to interrogate wave guide grating regions at a high repetition rate in the kHz range by scanning the angle of the incident coherent light. The ... -
Low temperature covalent wafer bonding for X-ray imaging detectors
(2019)Low temperature wafer bonding of silicon to various materials is a key technology for all applications requiring a low temperature budget, such as monolithic CMOS integrated pixel detectors [1]. Here, we combine wet chemical ... -
Low-Power and Low-Profile Miniature Atomic Clock Ceramic based flat form factor miniature atomic clock physics package (C-MAC)
(2017)This paper presents the results of the ESA funded C-MAC activity, started mid-2015 and currently in the assembly and testing phase. The objective of the activity is to develop an innovative and low-cost ceramic-based physics ... -
MEMS scanner with 2D tilt, piston and focus motion
(2017)A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of and/-15 degrees, a piston motion of 50 mu m and a focus/defocus control system of a 2mm diameter ... -
Optics and Photonics
(2021)Integrated photonics, freeform micro-optics, diffractive optical elements, AI vision systems, high-performance laser sources, instrumentation, and processing tools. -
Plenoptic Inspection System for Automatic Quality Control of MEMS and Microsystems
(2021)Optical quality control of MEMS and microsystems is challenging as these structures are micro-scale and three dimensional. Here we lay out different optical systems that can be used for 3D optical quality control in ... -
Reliability assessment and failure mode analysis of MEMS accelerometers for space applications
(2018)In the present work, the reliability assessment of capacitive MEMS accelerometers of 3 different suppliers (codenamed A, B, and C) for their use in space applications was performed. The developed reliability assessment ... -
Reliability assessment of miniaturised electromechanical RF relays for space applications
(2022-11)A test programme was developed for the reliability assessment and evaluation of radiofrequency (RF) miniaturised electromechanical relays (MEMR) as required for space application. The test programme allows to carry out the ... -
Reliability evaluation of a MEMS scanner
(2017)Previously, the realization and closed loop control of a MEMS scanner integrating position sensors made with piezoresistive sensors was presented. It consisted of a silicon compliant membrane with integrated position ... -
'Tic-Tac' made in Silicon
(2019)Silicon has been used in watch mechanisms for more than a decade, fueled by the developments in microfabrication and MEMS (Micro-Electro- Mechanical Systems) technologies. Of particular interest to the watchmaking are its ...