Browsing by Research Areas "MEMS & Packaging"
Now showing items 1-18 of 18
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3d Printing on MEMS: Integration of 3d Shock Stopper on a Micro Mirror
(2019)We have developed a polymer-based 3D shock stopper and absorber based on micro stereolithography technology that is integrated onto a prefabricated wafer of a MEMS micro mirror used as a high-power laser steering system. ... -
Compact optical MEMS accelerometers and temperature sensors
(2017)Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, ... -
Introduction of an angle interrogated, MEMS-based, optical waveguide grating system for label-free biosensing
(2016)The presented label-free optical biosensor system relies on a MEMS micro-mirror to interrogate wave guide grating regions at a high repetition rate in the kHz range by scanning the angle of the incident coherent light. The ... -
Low temperature covalent wafer bonding for X-ray imaging detectors
(2019)Low temperature wafer bonding of silicon to various materials is a key technology for all applications requiring a low temperature budget, such as monolithic CMOS integrated pixel detectors [1]. Here, we combine wet chemical ... -
Low-Power and Low-Profile Miniature Atomic Clock Ceramic based flat form factor miniature atomic clock physics package (C-MAC)
(2017)This paper presents the results of the ESA funded C-MAC activity, started mid-2015 and currently in the assembly and testing phase. The objective of the activity is to develop an innovative and low-cost ceramic-based physics ... -
MEMS scanner with 2D tilt, piston and focus motion
(2017)A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of and/-15 degrees, a piston motion of 50 mu m and a focus/defocus control system of a 2mm diameter ... -
Optics and Photonics
(2021)Integrated photonics, freeform micro-optics, diffractive optical elements, AI vision systems, high-performance laser sources, instrumentation, and processing tools. -
Plenoptic Inspection System for Automatic Quality Control of MEMS and Microsystems
(2021)Optical quality control of MEMS and microsystems is challenging as these structures are micro-scale and three dimensional. Here we lay out different optical systems that can be used for 3D optical quality control in ... -
Reliability assessment and failure mode analysis of MEMS accelerometers for space applications
(2018)In the present work, the reliability assessment of capacitive MEMS accelerometers of 3 different suppliers (codenamed A, B, and C) for their use in space applications was performed. The developed reliability assessment ... -
Reliability evaluation of a MEMS scanner
(2017)Previously, the realization and closed loop control of a MEMS scanner integrating position sensors made with piezoresistive sensors was presented. It consisted of a silicon compliant membrane with integrated position ... -
'Tic-Tac' made in Silicon
(2019)Silicon has been used in watch mechanisms for more than a decade, fueled by the developments in microfabrication and MEMS (Micro-Electro- Mechanical Systems) technologies. Of particular interest to the watchmaking are its ...