Now showing items 1-2 of 2

    • Compact optical MEMS accelerometers and temperature sensors 

      Timotijevic, B.; Petremand, Y.; Bayat, D.; Luetzelschwab, M.; Aebi, L.; Tormen, M. (2017)
      Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, ...
    • MEMS scanner with 2D tilt, piston and focus motion 

      Lani, S.; Bayat, D.; Petremand, Y.; Regamey, Y. J.; Onillon, E.; Pierer, J.; et al. (2017)
      A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of and/-15 degrees, a piston motion of 50 mu m and a focus/defocus control system of a 2mm diameter ...