Now showing items 1-2 of 2

    • Silicon Carbide Pressure Sensors for Harsh Environments 

      Hoogerwerf, A. C.; Durante, G. S.; James, R. J.; Dubois, M.; Dubochet, O.; Despont, M. (2019)
      The paper describes the fabrication of a silicon carbide piezoresistive pressure sensors intended for operating temperatures of up to 600°C. The different fabrication aspects, such as the metallization scheme, the etching ...
    • 'Tic-Tac' made in Silicon 

      Lani, S.; Pétremand, Y.; Dubochet, O.; Dadras, M.;  Barrot, F.; Dominé, E.; Despont, M. (2019)
      Silicon has been used in watch mechanisms for more than a decade, fueled by the developments in microfabrication and MEMS (Micro-Electro- Mechanical Systems) technologies. Of particular interest to the watchmaking are its ...