Browsing by Author "Heinz, B."
Now showing items 1-3 of 3
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Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters
Mertin, S.; Pashchenko, V.; Parsapour, F.; Nyffeler, C.; Sandu, C. S.; Heinz, B.; et al. (2017)Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, ... -
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content
Mertin, S.; Heinz, B.; Rattunde, O.; Christmann, G.; Dubois, M. A.; Nicolay, S.; et al. (2018)Partial substitution of aluminium by scandium in the wurtzite structure of aluminium nitride (AIN) leads to a large increase of the piezc electric response by more than a factor of 2. Therefore, aluminium scandium nitride ... -
Sputter deposition technology for Al(1?x)ScxN films with high Sc concentration
Heinz, B.; Mertin, S.; Rattunde, O.; Dubois, M. A.; Nicolay, S.; Christmann, G.; et al. (2017)Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. ...