Browsing by Author "Heinz, B."

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Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Mertin, S.; Pashchenko, V.; Parsapour, F.; Nyffeler, C.; Sandu, C. S.; Heinz, B.; et al. (2017)

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, ...
Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Mertin, S.; Heinz, B.; Rattunde, O.; Christmann, G.; Dubois, M. A.; Nicolay, S.; et al. (2018)

Partial substitution of aluminium by scandium in the wurtzite structure of aluminium nitride (AIN) leads to a large increase of the piezc electric response by more than a factor of 2. Therefore, aluminium scandium nitride ...
Sputter deposition technology for Al(1?x)ScxN films with high Sc concentration

Heinz, B.; Mertin, S.; Rattunde, O.; Dubois, M. A.; Nicolay, S.; Christmann, G.; et al. (2017)

Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. ...