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    • Silicon Carbide Pressure Sensors for Harsh Environments 

      Hoogerwerf, A. C.; Durante, G. S.; James, R. J.; Dubois, M.; Dubochet, O.; Despont, M. (2019)
      The paper describes the fabrication of a silicon carbide piezoresistive pressure sensors intended for operating temperatures of up to 600°C. The different fabrication aspects, such as the metallization scheme, the etching ...