Browsing by Author "Marozau, I."
Now showing items 1-6 of 6
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3d Printing on MEMS: Integration of 3d Shock Stopper on a Micro Mirror
Lani, S.; Chandran, O.; Auchlin, M.; Marozau, I.; Dunan, B. (2019)We have developed a polymer-based 3D shock stopper and absorber based on micro stereolithography technology that is integrated onto a prefabricated wafer of a MEMS micro mirror used as a high-power laser steering system. ... -
Can automotive MEMS be reliably used in space applications? An assessment method under sequential bi-parameter testing
Auchlin, M.; Marozau, I.; Bayat, D. Z.; Marchand, L.; Gass, V.; Sereda, O. (2020-01) -
Conformal Deposition of Conductive Single-Crystalline Cobalt Silicide Layer on Si Wafer via a Molecular Approach
Lin, T. H.; Margossian, T.; Zheng, L. Q.; Kumar, S.; Marozau, I.; Sereda, O.; et al. (2018)The realization of metal-semiconductor contacts plays a significant role in ultrascaled integrated circuits. Here, we establish a low-temperature molecular approach for the conformal deposition of a 20 nm Co-rich layer on ... -
Magneto-transport in La2/3Sr1/3MnO3/YBa2Cu3O7/Alq(3)/Co spin-valves
Cerreta, A.; Gaina, R.; Nuccio, L.; Marozau, I.; Sen, K.; Prada, R. D.; et al. (2020-10) -
Reliability assessment and failure mode analysis of MEMS accelerometers for space applications
Marozau, I.; Auchlin, M.; Pejchal, V.; Souchon, F.; Vogel, D.; Lahti, M.; et al. (2018)In the present work, the reliability assessment of capacitive MEMS accelerometers of 3 different suppliers (codenamed A, B, and C) for their use in space applications was performed. The developed reliability assessment ... -
Strain Engineering in Highly Mismatched SiGe/Si Heterostructures
Isa, F.; Jung, A.; Salvalaglio, M.; Dasilva, Y. A. R.; Marozau, I.; Meduna, M.; et al. (2017)In this work we present an innovative approach to realise coherent, highly-mismatched 3-dimensional heterostructures on substrates patterned at the micrometre-scale. The approach is based on the out-of-equilibrium deposition ...