Browsing by Author "Nyffeler, C."

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Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Mertin, S.; Pashchenko, V.; Parsapour, F.; Nyffeler, C.; Sandu, C. S.; Heinz, B.; et al. (2017)

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, ...