Browsing by Author "von Kanel, H."

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    • Low temperature covalent wafer bonding for X-ray imaging detectors 

      Razek, N.; Neves, J.; von Kanel, H.; Le Corre, P.; Ruedi, P. F.; Quaglia, R.; et al. (2019)
      Low temperature wafer bonding of silicon to various materials is a key technology for all applications requiring a low temperature budget, such as monolithic CMOS integrated pixel detectors [1]. Here, we combine wet chemical ...