Show simple item record

dc.contributor.authorMertin, S.
dc.contributor.authorPashchenko, V.
dc.contributor.authorParsapour, F.
dc.contributor.authorNyffeler, C.
dc.contributor.authorSandu, C. S.
dc.contributor.authorHeinz, B.
dc.contributor.authoret al.
dc.date.accessioned2021-12-09T13:27:10Z
dc.date.available2021-12-09T13:27:10Z
dc.date.issued2017
dc.identifier.citationin 2017 Ieee International Ultrasonics Symposium (Issue), ed New York: Ieee, 2017.
dc.identifier.isbn978-1-5386-3383-0
dc.identifier.urihttps://yoda.csem.ch/handle/20.500.12839/168
dc.description.abstractAluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting devices. In this work, process-microstructure-property relationships of such sputtered ASN films containing up to 42 at% Sc were investigated. Hereby, the influence of the process parameters on the film structure, the intrinsic stress and the piezoelectric response were carefully investigated. A high piezoelectric response (e(31),(f) = -2.67 C/m(2) and d(33,f) = 10.3 pm/V) was measured for films with 42 at% and 34 at% Sc, respectively. The results are very promising towards industrial applications.
dc.subjectthin films, microstructure, aluminium scandium nitride, piezoelectric, response, reactive magnetron sputtering
dc.titleEnhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters
dc.typeProceedings Article
dc.type.csemdivisionsDiv-T
dc.type.csemresearchareasOther


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

  • Research Publications
    The “Research Publications” collection provides bibliographic information for scientific papers including conference proceedings and presentations.

Show simple item record