Metallic strain gauges are well studied structures for their use in force sensing. Their fabrication is rather simple, easily compatible with many techniques are broadly scalable in both quantity and resolution. Here we present a fabrication process for high resolution strain sensors (down to the nN) that can also be operated in liquid, i.e. for life sciences applications. This fabrication method offers a very high yield and opens new possibilities for bioengineering, as for example single cell studies. (C) 2018 Elsevier B.V. All rights reserved.
Microelectronic Engineering, vol. 191, pp. 38-41, May 2018.