| dc.contributor.author | Timotijevic, B. | |
| dc.contributor.author | Dunbar, A. | |
| dc.contributor.author | Hoogerwerf, A. | |
| dc.contributor.author | Niketic, N. | |
| dc.contributor.author | Stanley, R. | |
| dc.contributor.author | Despont, M. | |
| dc.date.accessioned | 2021-12-09T14:00:44Z | |
| dc.date.available | 2021-12-09T14:00:44Z | |
| dc.date.issued | 2018 | |
| dc.identifier.citation | in Moems and Miniaturized Systems Xvii. vol. 10545 (Issue), W. Piyawattanametha, Y. H. Park, and H. Zappe, Eds., ed Bellingham: Spie-Int Soc Optical Engineering, 2018. | |
| dc.identifier.uri | https://yoda.csem.ch/handle/20.500.12839/242 | |
| dc.description.abstract | We have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 mu m and 15 mu m have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through postprocessing. | |
| dc.subject | optical filters, Fabry-Perot, infrared, silicon MEMS | |
| dc.title | Novel micro-fabricated Fabry-Perot filters in infrared | |
| dc.type | Journal Article | |
| dc.type.csemdivisions | Div-T | |
| dc.type.csemresearchareas | Photonics | |
| dc.identifier.doi | https://doi.org/10.1117/12.2285363 | |
