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dc.contributor.authorTimotijevic, B.
dc.contributor.authorDunbar, A.
dc.contributor.authorHoogerwerf, A.
dc.contributor.authorNiketic, N.
dc.contributor.authorStanley, R.
dc.contributor.authorDespont, M.
dc.date.accessioned2021-12-09T14:00:44Z
dc.date.available2021-12-09T14:00:44Z
dc.date.issued2018
dc.identifier.citationin Moems and Miniaturized Systems Xvii. vol. 10545 (Issue), W. Piyawattanametha, Y. H. Park, and H. Zappe, Eds., ed Bellingham: Spie-Int Soc Optical Engineering, 2018.
dc.identifier.urihttps://yoda.csem.ch/handle/20.500.12839/242
dc.description.abstractWe have designed, fabricated and tested narrow-band Fabry-Perot filters in the infrared using gold porous mirrors and a silicon spacer layer. The filter peaks at 10 mu m and 15 mu m have approximately 10% transmission and a 1.5% linewidth. A Fabry-Perot structure with plane metal layers having a similar linewidth would have a transmission of only 0.2%. Thus, for the same linewidth we have improved the transmission by a factor of 50. Apart from the optical enhancements, these filters also have the advantage that they can be made inexpensively in a standard silicon MEMS technology and that their resonances can be finely tuned through postprocessing.
dc.subjectoptical filters, Fabry-Perot, infrared, silicon MEMS
dc.titleNovel micro-fabricated Fabry-Perot filters in infrared
dc.typeJournal Article
dc.type.csemdivisionsDiv-T
dc.type.csemresearchareasPhotonics
dc.identifier.doihttps://doi.org/10.1117/12.2285363


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