Low temperature covalent wafer bonding for X-ray imaging detectors

Author

Razek, N.; Neves, J.; Le Corre, P.; Ruedi, P. F.; Quaglia, R.; Dasilva, Y. A. R.; et al.

Metadata

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Publication Reference

Japanese Journal of Applied Physics, vol. 59, p. 3, Feb 2020.

Year

2020-01

URI

https://yoda.csem.ch/handle/20.500.12839/411

Collections

Research Publications