Low temperature covalent wafer bonding for X-ray imaging detectors

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Author
Razek, N.
Neves, J.
Le Corre, P.
Ruedi, P. F.
Quaglia, R.
Dasilva, Y. A. R.
et al.
Abstract
Publication Reference
Japanese Journal of Applied Physics, vol. 59, p. 3, Feb 2020.
Year
2020-01
Sponsors