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    Multiple dehydrogenation reactions of negative ions in low pressure silane plasma chemistry

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    Author
    Howling, A. A.; Descoeudres, A.; Hollenstein, C.
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    Publication Reference
    Plasma Sources Science & Technology, vol. 29 (10), p. 17, Oct 2020.
    Year
    2020
    URI
    https://yoda.csem.ch/handle/20.500.12839/437
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