Multiple dehydrogenation reactions of negative ions in low pressure silane plasma chemistry

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Author
Howling, A. A.; Descoeudres, A.; Hollenstein, C.
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Publication Reference
Plasma Sources Science & Technology, vol. 29 (10), p. 17, Oct 2020.
Year
2020
URI
https://yoda.csem.ch/handle/20.500.12839/437
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