Two-photon grayscale lithography for free-form micro-optical arrays
| dc.contributor.author | Aderneuer, T. | |
| dc.contributor.author | Fernández, O. | |
| dc.contributor.author | Ferrini, R. | |
| dc.date.accessioned | 2021-12-15T19:07:29Z | |
| dc.date.available | 2021-12-15T19:07:29Z | |
| dc.date.issued | 2021-11 | |
| dc.identifier.citation | Optics Express, vol. 29 (24), pp. 39511-39520 | |
| dc.identifier.uri | https://yoda.csem.ch/handle/20.500.12839/472 | |
| dc.title | Two-photon grayscale lithography for free-form micro-optical arrays | |
| dc.type | Journal Article | |
| dc.type.csemdivisions | Div-R | |
| dc.type.csemresearchareas | MEMS & Packaging | |
| dc.type.csemresearchareas | Photonics |
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