Now showing items 1-6 of 6

    • 3d Printing on MEMS: Integration of 3d Shock Stopper on a Micro Mirror 

      Lani, S.; Chandran, O.; Auchlin, M.; Marozau, I.; Dunan, B. (2019)
      We have developed a polymer-based 3D shock stopper and absorber based on micro stereolithography technology that is integrated onto a prefabricated wafer of a MEMS micro mirror used as a high-power laser steering system. ...
    • Large 1D and 2D micro-mirror arrays for Universe and Earth Observation 

      Zamkotsian, F.; Petremand, Y.; Lanzoni, P.; Lani, S.; Barette, R.; Timotijevic, B.; et al. (2019)
      In future space missions for Universe and Earth Observation, scientific return could be optimized using MOEMS devices. Large micromirror arrays (MMA) are used for designing new generation of instruments. In Universe ...
    • MEMS scanner with 2D tilt, piston and focus motion 

      Lani, S.; Bayat, D.; Petremand, Y.; Regamey, Y. J.; Onillon, E.; Pierer, J.; et al. (2017)
      A MEMS scanner with a high level of motion freedom has been developed. It includes a 2D mechanical tilting capability of and/-15 degrees, a piston motion of 50 mu m and a focus/defocus control system of a 2mm diameter ...
    • Reliability evaluation of a MEMS scanner 

      Lani, S.; Marozau, Y.; Dadras, M. (2017)
      Previously, the realization and closed loop control of a MEMS scanner integrating position sensors made with piezoresistive sensors was presented. It consisted of a silicon compliant membrane with integrated position ...
    • Self-powered triboelectric touch sensor made of 3D printed materials 

      Haque, R. I.; Chandran, O.; Lani, S.; Briand, D. (2018)
      A novel approach of fabricating vertical-contact separation mode triboelectric nanogenerator employing three-dimensional (3D) printed functional layers and mechanical spring is presented with the ultimate goal of direct ...
    • 'Tic-Tac' made in Silicon 

      Lani, S.; Pétremand, Y.; Dubochet, O.; Dadras, M.;  Barrot, F.; Dominé, E.; Despont, M. (2019)
      Silicon has been used in watch mechanisms for more than a decade, fueled by the developments in microfabrication and MEMS (Micro-Electro- Mechanical Systems) technologies. Of particular interest to the watchmaking are its ...