Browsing CSEM Archive by Author "Salvalaglio, M."
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Enhancing elastic stress relaxation in SiGe/Si heterostructures by Si pillar necking
Isa, F.; Salvalaglio, M.; Dasilva, Y. A. R.; Jung, A.; Isella, G.; Erni, R.; et al. (2016)We demonstrate that the elastic stress relaxation mechanism in micrometre-sized, highly mismatched heterostructures may be enhanced by employing patterned substrates in the form of necked pillars, resulting in a significant ... -
From plastic to elastic stress relaxation in highly mismatched SiGe/Si heterostructures
Isa, F.; Salvalaglio, M.; Dasilva, Y. A. R.; Jung, A.; Isella, G.; Erni, R.; et al. (2016)We present a detailed experimental and theoretical analysis of the epitaxial stress relaxation process in micro-structured compositionally graded alloys. We focus on the pivotal SiGe/Si(001) system employing patterned Si ... -
Highly Mismatched, Dislocation-Free SiGe/Si Heterostructures
Isa, F.; Salvalaglio, M.; Dasilva, Y. A. R.; Meduna, M.; Barget, M.; Jung, A.; et al. (2016)An experiment has demonstrated that truly dislocation free SiGe crystals with widths of at least 5?m can be epitaxially grown on Si substrates by applying the compositional grading developed for layers to 3D structures. ... -
Strain Engineering in Highly Mismatched SiGe/Si Heterostructures
Isa, F.; Jung, A.; Salvalaglio, M.; Dasilva, Y. A. R.; Marozau, I.; Meduna, M.; et al. (2017)In this work we present an innovative approach to realise coherent, highly-mismatched 3-dimensional heterostructures on substrates patterned at the micrometre-scale. The approach is based on the out-of-equilibrium deposition ...