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    • Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS 

      Yandrapalli, S.; Ruffieux, D.; Villanueva, L. G. (2017)
      Integration of CMOS electronic circuits and electromechanical resonators has been pursued for a long time by many different research groups and even foundries. This would improve the overall performance of electromechanical ...