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dc.contributor.authorKehl, F.
dc.contributor.authorEtlinger, G.
dc.contributor.authorGartmann, T. E.
dc.contributor.authorTscharner, N.
dc.contributor.authorHeub, S.
dc.contributor.authorFollonier, S.
dc.identifier.citationSensors and Actuators B: Chemical, Volume 226, April 2016, Pages 135-143
dc.description.abstractThe presented label-free optical biosensor system relies on a MEMS micro-mirror to interrogate wave guide grating regions at a high repetition rate in the kHz range by scanning the angle of the incident coherent light. The angle-tunable MEMS mirror permits an extended scanning range and offers the flexibility to measure at various wavelengths and optical powers-an interesting feature for an enhanced surface-to-bulk sensitivity ratio and extended, multiplexed sensor arrays. An excellent refractometric sensitivity with a limit of detection towards effective refractive index changes of Delta n(eff)< 2 x 10(-7) and long-term stability (<10(-6) min(-1)) is reported, as well as the capability to perform affinity measurements for large (>150 kDa) and small (<250 Da) molecules. With fully-integrated optics, electronics and fluidics, the compact, low-power and affordable sensor unit is well-suited for in situ environmental monitoring or point-of-care diagnostics. (C) 2015 Elsevier B.V. All rights reserved.
dc.subjectWaveguide grating coupler,Label-free biosensor,Planar optical waveguide,Integrated optics,Evanescent wave sensor
dc.titleIntroduction of an angle interrogated, MEMS-based, optical waveguide grating system for label-free biosensing
dc.typeJournal Article
dc.type.csemresearchareasMEMS & Packaging

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