• Login
    View Item 
    •   YODA Home
    • CSEM Archive
    • Research Publications
    • View Item
    •   YODA Home
    • CSEM Archive
    • Research Publications
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Design of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering

    Thumbnail
    Author
    Kruis, Johan; Bellouard, Yves; Chappuis, Olivier; Clavel, Reymond
    Metadata
    Show full item record
    Abstract
    In laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature laser scanning-head based on a movable focusing lens to cope with this challenge.
    Publication Reference
    2012 International Symposium on Optomechatronic Technologies (ISOT 2012), Paris (France), pp. 1-2
    Year
    2012-10
    URI
    https://yoda.csem.ch/handle/20.500.12839/782
    Collections
    • Research Publications

    Browse

    All of YODACommunities & CollectionsBy Issue DateAuthorsTitlesResearch AreasBusiness UnitsThis CollectionBy Issue DateAuthorsTitlesResearch AreasBusiness Units

    My Account

    Login

    DSpace software copyright © 2002-2022  DuraSpace
    Contact Us | Send Feedback
    DSpace Express is a service operated by 
    Atmire NV