Show simple item record

dc.contributor.authorKruis, Johan
dc.contributor.authorBellouard, Yves
dc.contributor.authorChappuis, Olivier
dc.contributor.authorClavel, Reymond
dc.date.accessioned2022-02-14T17:07:55Z
dc.date.available2022-02-14T17:07:55Z
dc.date.issued2012-10
dc.identifier.citation2012 International Symposium on Optomechatronic Technologies (ISOT 2012), Paris (France), pp. 1-2
dc.identifier.urihttps://yoda.csem.ch/handle/20.500.12839/782
dc.description.abstractIn laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature laser scanning-head based on a movable focusing lens to cope with this challenge.
dc.titleDesign of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering
dc.typeProceedings Article
dc.type.csemdivisionsDiv-E
dc.type.csemresearchareasAdditive Manufacturing
dc.identifier.doi10.1109/ISOT.2012.6403285


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

  • Research Publications
    The “Research Publications” collection provides bibliographic information for scientific papers including conference proceedings and presentations.

Show simple item record