A 3-­DOF force measurement device for quality inspection applications of microsystems

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Author
Glettig, Wayne; Droz, Serge; Longchamp, Quentin; Rabe, Rodolph; Breguet, Jean-Marc
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Publication Reference
EUSPEN, Leuven (Belgium)
Year
2015-01-06
URI
https://yoda.csem.ch/handle/20.500.12839/817
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