Standardized TFLN Photonic Integrated Circuits Platform
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Author
Hamed Sattari, Ivan Prieto, Homa Zarebidaki, Jacopo Leo, Gregory Choong, Mattia Orvietani, Fatemeh Arefi, Alberto Della Torre, Yves Petremand, Michele Palmieri, Olivier Dubochet, Michel Despont
DOI
https://doi.org/10.1007/978-3-031-63378-2_15
Abstract
We present a thin-film lithium niobate (TFLN) on insulator photonic integrated circuits (PICs) platform based on a 150 mm wafer-scale manufacturing technology. The platform comprises a library of standardized building blocks, so-called process design kit (PDK). Low loss waveguides and fast electro optical modules are reliably manufactured in a well-defined foundry process addressing the demands of various fields from telecom to quantum applications.
Publication Reference
The 25th European Conference on Integrated Optics. ECIO 2024. Springer Proceedings in Physics, vol 402. Springer, Cham. https://doi.org/10.1007/978-3-031-63378-2_15
Year
2024-06-16