Fabricating 3D structures using spray coating
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Author
Pétremand, Y.
Grétillat, J.
Schildknecht, J.
Dubochet, O.
Overstolz, T.
DOI
Abstract
Micro-electro-mechanical systems (MEMS) are widely used in biomedical and life science applications. Their fabrication traditionally relies on a layer-by-layer process performed on planar substrates. However, MEMS devices inherently feature three-dimensional architectures, for which planar processing can impose significant limitations. Spray coating techniques offer a viable solution to overcome these constraints by enabling uniform coating and patterning of non-planar surfaces. The acquisition of a stand-alone spray coating tool significantly expands CSEM’s fabrication capabilities, opening new opportunities for the development of advanced devices, and the exploration of novel products and research projects.
Publication Reference
CSEM Scientific and Technical Report 2025, p. 109–110
Year
2025