Increasing the Quantum Efficiencies of Quantum Devices with Microlens Arrays
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Author
Zanella, F.
Schneider, C.
Ciric, L.
Morales, N.
Galli, P.
Basset, G.
DOI
Abstract
Microlenses replicated on front-illuminated single-photon avalanche diodes (SPAD) or back-illuminated CMOS image sensors are found to be stable to temperature variations, exposure to humidity, mechanical shocks, and vibrations, as well as irradiation by UV, protons, and gamma rays (e.g., for space applications). They highly improve the effective fill-factor, on front-illuminated SPAD-based image sensors, and the parasitic light sensitivity on a back-illuminated CMOS image sensor. Their broad transmission spectrum from NUV to NIR, combined with the wide geometrical space available to fabricate microlenses on various active substrates (150 mm wafer or die down to 2×2 mm2), make them suitable for a wide range of quantum photonics applications.
Publication Reference
CSEM Scientific and Technical Report 2022, p. 87
Year
2022