Multiple dehydrogenation reactions of negative ions in low pressure silane plasma chemistry

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Author
Howling, A. A.
Descoeudres, A.
Hollenstein, C.
Abstract
Publication Reference
Plasma Sources Science & Technology, vol. 29 (10), p. 17, Oct 2020.
Year
2020
Sponsors
URI
https://hdl.handle.net/20.500.12839/437
Collections
Research Publications