Multiple dehydrogenation reactions of negative ions in low pressure silane plasma chemistry

dc.contributor.authorHowling, A. A.
dc.contributor.authorDescoeudres, A.
dc.contributor.authorHollenstein, C.
dc.date.accessioned2021-12-13T16:36:09Z
dc.date.available2021-12-13T16:36:09Z
dc.date.issued2020
dc.identifier.citationPlasma Sources Science & Technology, vol. 29 (10), p. 17, Oct 2020.
dc.identifier.urihttps://hdl.handle.net/20.500.12839/437
dc.titleMultiple dehydrogenation reactions of negative ions in low pressure silane plasma chemistry
dc.typeJournal Article
dc.type.csemdivisionsBU-V
dc.type.csemresearchareasEnergy Harvesting
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