Electro-Optical Modulator in Thin-Film Lithium Niobate Foundry Process
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Author
Alberto Della Torre, Homa Zarebidaki, Jacopo Leo, Arno Mettraux, Gregory Choong, Mattia Orvietani, Yves Petremand, Ivan Prieto, Olivier Dubochet, Michel Despont, Hamed
DOI
https://doi.org/10.1007/978-3-031-63378-2_87
Abstract
The Characterization of thin-film lithium niobate modulators with electro-optical bandwidth higher than 50 GHz is presented. The devices, operating in the telecom C-band, are manufactured in a standard foundry process following design rules. The 7.95 mm long modulator has a half-wave voltage of 3.2 V and an extinction ratio of 15.4 dB. We also show that modulators, with the same design but fabricated in different wafers, present very similar performances, corroborating the reliability of the process design kit (PDK) component and the manufacturing process.
Publication Reference
The 25th European Conference on Integrated Optics. ECIO 2024. Springer Proceedings in Physics, vol 402. Springer, Cham. https://doi.org/10.1007/978-3-031-63378-2_87
Year
2024-06-16