Fabrication of Arrays of Quasi-micro-beads for Parallel Nanojet Super-resolution Imaging
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Author
Basset, G.
Luu-Dinh, A.
Schneider, C.
Schlup, D.
Perrin, S.
Fangting, W.
Lecler, S.
DOI
Abstract
Many industries face the challenge of observing submicron objects quickly and reliably. It can be the inspection of micromechanical parts for quality controls, cell imaging for the analysis of the reaction of cells to external agents, typically future drugs to be tested, or quality control in microelectronics or in photonics. The techniques used today are optical microscopy (confocal, SNOM), electron microscopy, AFM and fluorescence microscopy in biology. These techniques have made a great deal of progress but have various limitations. Some are not sufficiently resolved while others are too long/complex for industrial processes. It is of high interest to make accessible a simple technique of super-resolved optical microscopy in 2D and 3D that can meet the current requirements of the industry. CSEM is producing sup-hemispherical microlens arrays to enable such fast and versatile super-resolution imaging.
Publication Reference
CSEM Scientific and Technical Report 2021, p. 99
Year
2021