Quantitative Micro-Raman Spectroscopy for Partial Pressure Measurement in Small Volumes

dc.contributor.authorKarlen, Sylvain
dc.contributor.authorGobet, Jean
dc.contributor.authorOverstolz, Thomas
dc.contributor.authorHaesler, Jacques
dc.contributor.authorLecomte, Steve
dc.description.abstractWe demonstrate the quantitative capabilities of Raman confocal microscopy as a nondestructive method to measure the partial pressure of molecular gases in mm3 range sealed volume having an optical access. Thanks to a calibration procedure, we apply this technique for the characterization of the absolute nitrogen partial pressure inside buffered micro electromechanical system (MEMS) atomic vapor cells developed for atomic clocks. Our results are compared with measurements obtained by rubidium hyperfine frequency spectroscopy and a good agreement is demonstrated between the two methods, with a three-sigma detection limit below 10 mbar for a 1 h integration time, using a 33 mW 532 nm excitation laser. These results prove the potential of confocal micro-Raman spectroscopy as a simple and nondestructive method for small-scale pressure measurements.
dc.identifier.citationApplied Spectroscopy, vol. 71 (12), pp. 2707-2713
dc.titleQuantitative Micro-Raman Spectroscopy for Partial Pressure Measurement in Small Volumes
dc.typeJournal Article
dc.type.csemresearchareasScientific Instrumentation