Friction coefficient of diamond under conditions compatible with microelectromechanical systems applications
| dc.contributor.author | Gobet, J. | |
| dc.contributor.author | Volpe, P. N. | |
| dc.contributor.author | Dubois, M. A. | |
| dc.date.accessioned | 2021-12-09T13:14:56Z | |
| dc.date.available | 2021-12-09T13:14:56Z | |
| dc.date.issued | 2016 | |
| dc.description.abstract | Because of its good tribological properties, diamond has been suggested to solve the known reliability issues in silicon MEMS components submitted to frictional contacts. An evaluation of self-mating diamond friction under a low load, representative of a number of MEMS applications, was undertaken. Results have shown that initial friction coefficients of 0.02-0.05 can be achieved, as reported in the literature. However, continuation of the test for an extended period of time invariably led to a strong increase of the friction coefficient. This phenomenon has been observed with different types of diamonds (mono-, micro-, or nano-crystalline), suggesting that it is a general behavior for diamond under our experimental conditions. A micro structuration of the surface prevented this phenomenon by limiting the increase of the contact area resulting from wear. (C) 2016 AIP Publishing LLC. | |
| dc.identifier.citation | Applied Physics Letters, vol. 108 (12), p. 4, Mar 2016. | |
| dc.identifier.doi | https://doi.org/10.1063/1.4944538 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12839/85 | |
| dc.subject | thin-films, wear, ultrananocrystalline, silicon, coatings, behavior, carbon, mems, Physics | |
| dc.title | Friction coefficient of diamond under conditions compatible with microelectromechanical systems applications | |
| dc.type | Journal Article | |
| dc.type.csemdivisions | BU-T | |
| dc.type.csemresearchareas | Other |