A 3-­DOF force measurement device for quality inspection applications of microsystems

dc.contributor.authorGlettig, Wayne
dc.contributor.authorDroz, Serge
dc.contributor.authorLongchamp, Quentin
dc.contributor.authorRabe, Rodolph
dc.contributor.authorBreguet, Jean-Marc
dc.date.accessioned2022-02-14T17:07:59Z
dc.date.available2022-02-14T17:07:59Z
dc.date.issued2015-01-06
dc.identifier.citationEUSPEN, Leuven (Belgium)
dc.identifier.urihttps://hdl.handle.net/20.500.12839/817
dc.titleA 3-­DOF force measurement device for quality inspection applications of microsystems
dc.typeProceedings Article
dc.type.csemdivisionsDiv-E
dc.type.csemresearchareasScientific Instrumentation
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