Silicon Flexure-based Micro-balance for Batch Weighing Processes
Loading...
Author
Henein, Simon
Barrot, François
Domman, A.
Droz, Serge
Lisowski, L.
Mayor, J.-M.
Overstolz, Thomas
Schwab, P.
Walter, P.
Verjus, Christophe
DOI
Abstract
micro-balance prototype based on a novel silicon compliant structure, a voice-coil actuator and an optical zero position sensor has been manufactured, integrated and tested in closed loop. The very small footprint of the balance enables its use in 2D arrays having a pitch of 9 mm.
Publication Reference
CSEM Scientific and Technical Report 2008, p. 89
Year
2008