Micro-optics-enhanced imaging of microfluidics in 200 mm wafer manufacturing
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Author
Zanella, F.
Morales, N.
Ciric, L.
Asbahi, M.
Basset, G.
DOI
Abstract
The integration of microlenses with microfluidic devices has emerged as a promising approach to enhance optical imaging performance while enabling higher-throughput biological experimentation. This work demonstrates, for the first time to the authors’ knowledge, the successful imprinting of microlenses onto microfluidic wafer-stacks processed on industry-standard 200mm glass wafers. Key technical challenges related to contamination avoidance, mechanical stress, fluorescence, and precise optical-to-fluidic alignment were addressed using a selective-area UV-imprinting approach. The resulting wafer-stacks exhibited high optical quality, low defect density, and excellent alignment accuracy without compromising the integrity of the microfluidic structures. This demonstration validates the scalability of micro-optics-enhanced microfluidics on industrial platforms and opens the door to broader adoption in academic research, applied R&D, and industrial settings.
Publication Reference
CSEM Scientific and Technical Report 2025, p. 53–54
Year
2025