An Integrated MEMS Magnetic Gradiometer Rejecting Vibrations and Stray Fields

dc.contributor.authorGasparin, Enrico
dc.contributor.authorHoogerwerf, Arno
dc.contributor.authorBayat, Dara
dc.contributor.authorSpinola Durante, Guido
dc.contributor.authorPetremand, Yves
dc.contributor.authorTormen, Maurizio
dc.contributor.authorDespont, Michel
dc.contributor.authorClose
dc.date.accessioned2024-05-30T06:39:26Z
dc.date.available2024-05-30T06:39:26Z
dc.date.issued2024-09-09
dc.description.abstractDue to electrification, magnetic sensors are increasingly deployed in magnetically polluted environments. To reject stray fields, differential sensing schemes are typically used. In this paper, we rely instead on a single-point gradiometric sensing scheme based on the force exerted on a magnet, which is directly related to the magnetic field gradient. Unlike the prior art, our concept uses a differential MEMS force-sensing mechanical transducer. The overall sensor rejects not only magnetic stray fields, but also mechanical disturbances such as vibration and gravity. It is the first single-point MEMS gradiometer that can operate unshielded in various orientations. Our prototype realization achieves a noise density of 4 nT/mm/√Hz in a ±300 μT/mm measurement range. We demonstrate its operational effectiveness in a bus-bar current sensing application. Finally, the paper discusses the remaining weaknesses and provides an outlook for MEMS-based magnetic sensors.
dc.description.sponsorshipInnoSuisse
dc.identifier.citationESSERC 2024 Conference, Bruges, Belgium 9-12 September 2023
dc.identifier.urihttps://hdl.handle.net/20.500.12839/1400
dc.language.isoen
dc.titleAn Integrated MEMS Magnetic Gradiometer Rejecting Vibrations and Stray Fields
dc.typeProceedings
dc.type.csemdivisionsBU-T
dc.type.csemresearchareasScientific Instrumentation
dc.type.csemresearchareasMEMS & Packaging
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