HybSi - Hybridization of Silicon Micro-Components
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Author
Barrot, François
Kiener, Lionel
Bayat, Dara
et al.
Abstract
Combining its expertise in the domains of precision-mechanisms and micro-fabrication techniques, CSEM shows that high performance centimeterscale mechanisms and systems benefit from the hybridization of silicon parts with other materials. The approach to bridge the gap between MEMS and Mechatronics opens a wide range of high added value markets, ranging from the watch industry to the medical devices industry. Already the field of Scientific Instrumentation encompasses a wide variety of fields such as Life Sciences, Metrology, and Opto-Mechatronics. CSEM strategic Macro-MEMS research activitiy is targeting to implement new tools and processes to better serve these key markets in Switzerland.
Publication Reference
CSEM Scientific and Technical Report 2013, page 13
Year
2013