UV-replicated microlenses for quantum devices

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Zanella, Frédéric
Schneider, Christian
Ciric, Luka
Basset, Guillaume
Microlenses replicated on front-illuminated single-photon avalanche diodes (SPAD) or back-illuminated CMOS image sensor are found to be stable to temperature variations, exposure to humidity, mechanical shocks and vibrations, as well as irradiation by gamma rays (for space applications). They highly improve the effective fill-factor, on front-illuminated SPAD-based image sensors, and the parasitic light sensitivity on a back-illuminated CMOS image sensor. Their broad transmission spectrum from NUV to NIR, combined with the wide geometrical space available to fabricate microlenses on various active substrates (wafer or die down to 2×2 mm2), make them suitable to a wide range of quantum photonics applications.
Publication Reference
SPIE OPTO, Quantum Sensing and Nano Electronics and Photonics XIX, 124300C, San Francisco, CA, USA
The UV stability test campaign was funded by the EU H2020 project Phabuloμs (grant 871710) and the shown nearly gapless MLA by the Innosuisse project SPADLens (agreement 2155010564).