UV-replicated microlenses for quantum devices
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Author
Zanella, Frédéric
Schneider, Christian
Ciric, Luka
Basset, Guillaume
Abstract
Microlenses replicated on front-illuminated single-photon avalanche diodes (SPAD) or back-illuminated CMOS image
sensor are found to be stable to temperature variations, exposure to humidity, mechanical shocks and vibrations, as well
as irradiation by gamma rays (for space applications). They highly improve the effective fill-factor, on front-illuminated
SPAD-based image sensors, and the parasitic light sensitivity on a back-illuminated CMOS image sensor. Their broad
transmission spectrum from NUV to NIR, combined with the wide geometrical space available to fabricate microlenses
on various active substrates (wafer or die down to 2×2 mm2), make them suitable to a wide range of quantum photonics
applications.
Publication Reference
SPIE OPTO, Quantum Sensing and Nano Electronics and Photonics XIX, 124300C, San Francisco, CA, USA
Year
2023-03-15
Sponsors
The UV stability test campaign was funded by the EU H2020 project Phabuloμs (grant 871710) and the shown nearly
gapless MLA by the Innosuisse project SPADLens (agreement 2155010564).