Mechanical Components made of Silicon for Macroscopic 3D Sensors and Actuators
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Author
Barrot, François
Henein, S.
Jeanneret, S.
Fournier, R.
Giriens, Laurent
Droz, Serge
Toimil, M.
Gumy, Mathias
Carrel, C.
DOI
Abstract
Monocrystalline silicon is a material of interest for the design of macroscopic 3D sensors and actuators comprising flexure hinges. However, the bending strength of silicon flexure hinges obtained by deep reactive ion etching (DRIE) is strongly dependent on design and process parameters. The main design rules for such structures have been established based on a representative batch of flexure hinges of different shapes, sizes and surface treatments. A 3D macroscopic silicon manipulator, as well as a 3D macroscopic touch probe, has been designed manufactured and tested.
Publication Reference
CSEM Scientific & Technical Report 2011, p. 11
Year
2011