Hybrid Integration of Microfabricated Components
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Author
Barrot, François
Bayat, Dara
Cardot, Francis
Clerc, P.-A.
Fournier, R.
Guillot, L.
Jeanneret, S.
Kruis, J.
Lani, S.
Sarajlic, M.
DOI
Abstract
CSEM believes that the hybridization of silicon parts with other materials is one of the promising trends for the design of high performance microsystems. In 2012, CSEM has investigated new techniques for both the hybrid integration of silicon at wafer level and at component level.
Publication Reference
CSEM Scientific & Technical Report 2012, p. 15
Year
2012