Mastering of Multi-sag Microlens Arrays at Wafer Scale

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dc.contributor.authorLahmar, M. K.
dc.contributor.authorZanella, F.
dc.contributor.authorSchildknecht, J.
dc.contributor.authorCiric, L.
dc.contributor.authorBasset, G.
dc.date.accessioned2025-03-17T15:04:18Z
dc.date.available2025-03-17T15:04:18Z
dc.date.issued2023
dc.description.abstractCSEM offers to its customers an engineering and foundry service of microlens arrays (MLA), ranging from design, origination and prototyping up to small-series production on bare dies of few mm2, arrays of dies or wafers. The sag, the distance between the top microlens vertex to its base, provides the lens focal length when combined with the lens diameter and the material used. CSEM is improving its MLA wafer-scale origination process from mono-sag to multi-sag as reported here.
dc.identifier.citationCSEM Scientific and Technical Report 2023, p. 71
dc.identifier.urihttps://hdl.handle.net/20.500.12839/1647
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.titleMastering of Multi-sag Microlens Arrays at Wafer Scale
dc.typeCSEM Report
dc.type.csemdivisionsBU-T
dc.type.csemresearchareasPhotonics
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