Sputtered polySi(n) passivating contacts compatible with direct metallization
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Author
Diaz Leon, J. J.
Libraro, S.
Ingenito, A.
Allebé, C.
Hübner, S.
Dippell, T.
Paviet-Salomon, B.
Abstract
Publication Reference
Paper presented at the AIP Conference Proceedings 2709
Year
2022-11