High resolution polymer coated strain sensors for in-liquid operation

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dc.contributor.authorSorba, F.
dc.contributor.authorMartin-Olmos, C.
dc.date.accessioned2021-12-09T14:00:20Z
dc.date.available2021-12-09T14:00:20Z
dc.date.issued2018
dc.description.abstractMetallic strain gauges are well studied structures for their use in force sensing. Their fabrication is rather simple, easily compatible with many techniques are broadly scalable in both quantity and resolution. Here we present a fabrication process for high resolution strain sensors (down to the nN) that can also be operated in liquid, i.e. for life sciences applications. This fabrication method offers a very high yield and opens new possibilities for bioengineering, as for example single cell studies. (C) 2018 Elsevier B.V. All rights reserved.
dc.identifier.citationMicroelectronic Engineering, vol. 191, pp. 38-41, May 2018.
dc.identifier.doihttps://doi.org/10.1016/j.mee.2018.01.020
dc.identifier.urihttps://hdl.handle.net/20.500.12839/235
dc.subjectStrain sensor, Polymer MEMS, Metallic gauges, force, technology, Engineering, Science and Technology - Other Topics, Optics, Physics
dc.titleHigh resolution polymer coated strain sensors for in-liquid operation
dc.typeJournal Article
dc.type.csemdivisionsBU-T
dc.type.csemresearchareasOther
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