Polyimide: A new platform for biocompatible MEMS
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Author
Surbled, P.
Dubochet, O.
Brunazzo, D.
DOI
Abstract
The article explores the use of polyimide films in developing biocompatible Micro-Electro-Mechanical Systems (MEMS) for healthcare applications. It begins by highlighting the limitations of traditional rigid substrates and the growing demand for minimally invasive, reliable devices. Polyimide is presented as an ideal material due to its thermal stability, chemical resistance, flexibility, and proven biocompatibility. The technical approach involves microfabrication technologies such as spin-coating polyimide layers, curing for mechanical integrity, and integrating metallization, photolithography, etching to create flexible circuits and sensor arrays. An example use case is described in this article which shows an artificial iris incorporating polyimide-based antennas. Furthermore, more complex devices can be fabricated by integrating heterogeneous components within the microfabrication process. The discussion emphasizes polyimide’s role in enabling flexible, high-performance medical devices while noting challenges such as alignment precision, bonding reliability, and long-term stability. The article concludes that polyimide-based systems represent a promising route toward scalable, biocompatible solutions for diagnostic and therapeutic applications.
Publication Reference
CSEM Scientific and Technical Report 2025, p. 67–68
Year
2025