Two-photon grayscale lithography for free-form micro-optical arrays

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dc.contributor.authorAderneuer, T.
dc.contributor.authorFernández, O.
dc.contributor.authorFerrini, R.
dc.date.accessioned2021-12-15T19:07:29Z
dc.date.available2021-12-15T19:07:29Z
dc.date.issued2021-11
dc.identifier.citationOptics Express, vol. 29 (24), pp. 39511-39520
dc.identifier.urihttps://hdl.handle.net/20.500.12839/472
dc.titleTwo-photon grayscale lithography for free-form micro-optical arrays
dc.typeJournal Article
dc.type.csemdivisionsBU-R
dc.type.csemresearchareasMEMS & Packaging
dc.type.csemresearchareasPhotonics
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