Compact optical MEMS accelerometers and temperature sensors
No Thumbnail Available
Author
Timotijevic, B.
Petremand, Y.
Bayat, D.
Luetzelschwab, M.
Aebi, L.
Tormen, M.
Abstract
Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, metal-free sensors for such systems has gained a lot of attention due to the fact that they are resistant to typically very strong electromagnetic fields and that they are non-conductive. We present miniature temperature and accelerometer optical sensors using a common silicon MEMS platform. A linear response with a deviation as small as 1% between set and measured accelerations has been obtained in an acceleration range 0-40g. Preliminary tests for temperature sensors indicate a linear response with sensitivity better than 1 degrees C in a range of 20 degrees C to 150 degrees C.
Publication Reference
in Moems and Miniaturized Systems Xvi. vol. 10116 (Issue), W. Piyawattanametha and Y. H. Park, Eds., ed Bellingham: Spie-Int Soc Optical Engineering, 2017.
Year
2017